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Freescale Semiconductor Technical Data
MPXM2053 Rev. 2, 10/2004
50 kPa On- Chip Temperature Compensated & Calibrated Silicon Pressure Sensors
The MPXM2053 device is a silicon piezoresistive pressure sensor providing a highly accurate and linear voltage output -- directly proportional to the applied pressure. The sensor is a single, monolithic silicon diaphragm with the strain gauge and a thin--film resistor network integrated on--chip. The chip is laser trimmed for precise span and offset calibration and temperature compensation. Features * Temperature Compensated Over 0C to +85C * Available in Easy--to--Use Tape & Reel * Ratiometric to Supply Voltage * Gauge Ported & Non Ported Options Application Examples * Pump/Motor Controllers * Robotics * Level Indicators * Medical Diagnostics * Pressure Switching * Non--Invasive Blood Pressure Measurement Figure 1 shows a block diagram of the internal circuitry on the stand--alone pressure sensor chip.
VS 3 THIN FILM TEMPERATURE COMPENSATION AND CALIBRATION CIRCUITRY 1 GND
MPXM2053 SERIES
Freescale Semiconductor Preferred Device
0 to 50 kPa (0 to 7.25 psi) 40 mV FULL SCALE SPAN (TYPICAL)
MPAK PACKAGE
SCALE 1:1 MPXM2053D/DT1 CASE 1320
SCALE 1:1
2 4
X--ducer SENSING ELEMENT
Vout+ Vout--
MPXM2053GS/GST1 CASE 1320A
PIN NUMBER
1 2 Gnd +Vout 3 4 VS --Vout
Figure 1. Temperature Compensated Pressure Sensor Schematic VOLTAGE OUTPUT versus APPLIED DIFFERENTIAL PRESSURE The differential voltage output of the sensor is directly proportional to the differential pressure applied. The output voltage of the differential or gauge sensor increases with increasing pressure applied to the pressure side (P1) relative to the vacuum side (P2). Similarly, output voltage increases as increasing vacuum is applied to the vacuum side (P2) relative to the pressure side (P1).
Preferred devices are Freescale Semiconductor recommended choices for future use and best overall value.
(c) Freescale Semiconductor, Inc., 2004. All rights reserved.
MPXM2053 SERIES 1
Sensor Device Data Freescale Semiconductor
MAXIMUM RATINGS(NOTE)
Rating Maximum Pressure (P1 > P2) Storage Temperature Operating Temperature Symbol Pmax Tstg TA Value 200 --40 to +125 --40 to +125 Unit kPa C C
NOTE: Exposure beyond the specified limits may cause permanent damage or degradation to the device.
OPERATING CHARACTERISTICS (VS = 10 Vdc, TA = 25C unless otherwise noted, P1 > P2)
Characteristic Pressure Supply Range(1) Voltage(2) Symbol POP VS Io VFSS Voff V/P -- (0 to 50 kPa) -- -- TCVFSS TCVoff Zin Zout (10% to 90%) tR -- -- Min 0 -- -- 38.5 --1.0 -- --0.6 -- -- --2.0 --1.0 1000 1400 -- -- -- Typ -- 10 6.0 40 -- 0.8 -- 0.1 0.5 -- -- -- -- 1.0 20 0.5 Max 50 16 -- 41.5 1.0 -- 0.4 -- -- 2.0 1.0 2500 3000 -- -- -- Unit kPa Vdc mAdc mV mV mV/kPa %VFSS %VFSS %VFSS %VFSS mV ms ms %VFSS
Supply Current Full Scale Span(3) Offset(4) Sensitivity Linearity(5) Pressure Hysteresis(5) Temperature Hysteresis(5) (--40C to +125C) Temperature Effect on Full Scale Span(5) Temperature Effect on Input Impedance Output Impedance Response Warm--Up Offset Stability(7) Time(6) Offset(5)
NOTES: 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. Operating the device above the specified excitation range may induce additional error due to device self--heating. 3. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 4. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 5. Accuracy (error budget) consists of the following: * Linearity: Output deviation from a straight line relationship with pressure, using end point method, over the specified pressure range. * Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. * Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25C. * TcSpan: Output deviation at full rated pressure over the temperature range of 0 to 85C, relative to 25C. * TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85C, relative to 25C. 6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 7. Offset stability is the product's output deviation when subjected to 1000 hours of Pulsed Pressure, Temperature Cycling with Bias Test.
MPXM2053 SERIES 2 Sensor Device Data Freescale Semiconductor
LINEARITY Linearity refers to how well a transducer's output follows the equation: Vout = Voff + sensitivity x P over the operating pressure range. There are two basic methods for calculating nonlinearity: (1) end point straight line fit (see Figure 2) or (2) a least squares best line fit. While a least squares fit gives the "best case" linearity error (lower numerical value), the calculations required are burdensome. Conversely, an end point fit will give the "worst case" error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. Freescale Semiconductor's specified pressure sensor linearities are based on the end point straight line method measured at the midrange pressure.
LEAST SQUARES FIT RELATIVE VOLTAGE OUTPUT EXAGGERATED PERFORMANCE CURVE
LEAST SQUARE DEVIATION STRAIGHT LINE DEVIATION
END POINT STRAIGHT LINE FIT
OFFSET 0 50 PRESSURE (% FULLSCALE) 100
Figure 2. Linearity Specification Comparison
ON-CHIP TEMPERATURE COMPENSATION and CALIBRATION
Figure 3 shows the minimum, maximum and typical output characteristics of the MPXM2053 series at 25C. The output is directly proportional to the differential pressure and is essentially a straight line. A silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm.
40 35 OUTPUT (mVdc) 30 25 20 15 10 5 kPa PSI 0 --5 0
VS = 10 Vdc TA = 25C P1 > P2 MAX
TYP
SPAN RANGE (TYP) MIN
12.5 1.8
25 3.6
37.5 5.4
50 7.25
OFFSET (TYP)
Figure 3. Output versus Pressure Differential
ORDERING INFORMATION
Device Type MPXM2053D MPXM2053DT1 MPXM2053GS MPXM2053GST1 Options Non--ported Non--ported, Tape and Reel Ported Ported, Tape and Reel Case No No. 1320 1320 1320A 1320A
MPXM2053 SERIES Sensor Device Data Freescale Semiconductor 3
PACKAGE DIMENSIONS
2X
0.006 C A B E e
PIN 4 NOTES: 1. DIMENSIONS ARE IN INCHES. 2. INTERPRET DIMENSIONS AND TOLERANCES PER ASME Y14.5M--1994. 3. DIMENSIONS "D" AND "E1" DO NOT INCLUDE MOLD FLASH OR PROTRUSION. MOLD FLASH OR PROTRUSION SHALL NOT EXCEED .006" PER SIDE. 4. ALL VERTICAL SURFACES TO BE 5 MAXIMUM. 5. DIMENSIONS "b" DOES NOT INCLUDE DAMBAR PROTRUSION. ALLOWABLE DAMBAR PROTRUSION SHALL BE .008 MAXIMUM. INCHES MIN MAX .155 .165 .002 .010 .014 .018 .120 .130 .245 .255 .475 .485 .325 .335 .050 BSC .025 BSC .038 .048 0 7 STYLE 1: PIN 1. 2. 3. 4.
e/2
b1 0.004
M
PIN 1
CAB
4X
b CAB
0.004
M
E1
B
A
D
DIM A A1 b b1 D E E1 e e/2 L
GND +Vout Vs --Vout
A 0.004 DETAIL E C
SEATING PLANE
.014
GAGE PLANE
A1
L DETAIL E
CASE 1320-02 ISSUE A MPAK, STYLE 1
MPXM2053 SERIES 4 Sensor Device Data Freescale Semiconductor
PACKAGE DIMENSIONS
2X
0.006 C A B E e e/2 A1 L DETAIL E
4X
.014
GAGE PLANE
b CAB
b1 0.004
M
N CAB
0.004
M
P
NOTES: 1. DIMENSIONS ARE IN INCHES. 2. INTERPRET DIMENSIONS AND TOLERANCES PER ASME Y14.5M--1994. 3. DIMENSIONS "D" AND "E1" DO NOT INCLUDE MOLD FLASH OR PROTRUSION. MOLD FLASH OR PROTRUSION SHALL NOT EXCEED .006" PER SIDE. 4. ALL VERTICAL SURFACES TO BE 5 MAXIMUM. 5. DIMENSIONS "b" DOES NOT INCLUDE DAMBAR PROTRUSION. ALLOWABLE DAMBAR PROTRUSION SHALL BE .008 MAXIMUM. INCHES MIN MAX .377 .397 .002 .010 .014 .018 .120 .130 .245 .255 .475 .485 .325 .335 .050 BSC .025 BSC .013 .023 .283 .293 .363 .373 .107 .117 .192 .202 0 7
S A DETAIL E
0.004 E1 C
SEATING PLANE
B
A
D
DIM A A1 b b1 D E E1 e e/2 L M N P S
CASE 1320A-02 ISSUE O MPAK, STYLE 1
MPXM2053 SERIES Sensor Device Data Freescale Semiconductor 5
NOTES
MPXM2053 SERIES 6 Sensor Device Data Freescale Semiconductor
NOTES
MPXM2053 SERIES Sensor Device Data Freescale Semiconductor 7
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MPXM2053 Rev. 2 10/2004
MPXM2053 SERIES 8 Sensor Device Data Freescale Semiconductor

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